Multilayer Mirror Sample Holder with Cooling
Our project sponsor, ASML, is the sole manufacturer of extreme ultraviolet lithography machines used in semiconductor chip manufacturing. Variations of their proprietary machinery are used around the world by some of the biggest electronics manufacturers and when issues occur, ASML is responsible for finding the root cause. To replicate the various environments encountered in their customer’s machines, Multilayer Mirror (MLM) samples are placed into a vacuum test chamber with different gas compositions and temperatures for total lifecycle testing.
The current method of sample heat regulation utilizes an off-the-shelf optics breadboard which is only capable of providing cooling to the bottom surface of the samples leaving the top and side portions exposed to high levels of heat (up to 3000W and 300°C). It is because of this that ASML has requested a holder capable of cooling the sides and bottom of multiple MLM samples to 30-50°C for an extended period of time.
Our design solution features an aluminum baseplate with an internally machined serpentine channel for cooling water to pass through (18 LPM at 16.5°C). This channel is sealed with a fluoroelastomer gasket and then covered with a thin aluminum plate. Thermal Simulation was performed using SolidWorks and testing with performed using a process oven on campus at SDSU.
Data was collected using a custom temperature monitoring system also developed by the team in the first semester. This system uses an Arduino microprocessor that takes simultaneous readings from four integrated, K-type thermocouples. Their signals are amplified and then passed through a level converter to match the power requirements of the microprocessor.
YouTube Video Link
The current method of sample heat regulation utilizes an off-the-shelf optics breadboard which is only capable of providing cooling to the bottom surface of the samples leaving the top and side portions exposed to high levels of heat (up to 3000W and 300°C). It is because of this that ASML has requested a holder capable of cooling the sides and bottom of multiple MLM samples to 30-50°C for an extended period of time.
Our design solution features an aluminum baseplate with an internally machined serpentine channel for cooling water to pass through (18 LPM at 16.5°C). This channel is sealed with a fluoroelastomer gasket and then covered with a thin aluminum plate. Thermal Simulation was performed using SolidWorks and testing with performed using a process oven on campus at SDSU.
Data was collected using a custom temperature monitoring system also developed by the team in the first semester. This system uses an Arduino microprocessor that takes simultaneous readings from four integrated, K-type thermocouples. Their signals are amplified and then passed through a level converter to match the power requirements of the microprocessor.
YouTube Video Link
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